PECVD is actually a modification into the CVD system, where the plasma is used to improve the decomposition from the reactive gas source. In this process, distinct forms of ions and radicals shaped from chemical reactions during the plasma (primarily electron affect ionization and dissociation) diffuse towards the substrate where https://www.facebook.com/permalink.php?story_fbid=pfbid0nLr2Wd7Z3ocDdek1Xqcj36XaFbWoHFYfpzUrPzrnhMvLGekPTzWkdqd3bwoBkHpql&id=61562415773754&__cft__[0]=AZWpIpvBgwqCCElo19RvZg3rUbwX9QFCQKpKO1Ic5z1Y049jNeKBKWC3zxugL8K67lfcxR8GaDN2b3uHZWzwDh8gcZitfCeSWAE7cFNRbIqfwiHPwoIg5Eac75QxhFVWrH27m4SAtDoRdyQdkfOiOV_fLR-MrggvrCKGjG7rxswdHFwNNR7AP_GqUkd14sxyOYBCYRYBwj0hG27rYr7hEf68&__tn__=%2CO%2CP-R